The nEXT85 turbomolecular pump builds upon the success of the EXT75DX to deliver a pump with significantly improved performance in a smaller package. The rotor has been totally re-designed to optimize pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability. In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.
Features & Benefits
Class leading performance in a reduced footprint
Enhanced customer choice with standard and compression focused variants Increased operating envelope maximized by Edwards’ patented direct impeller temperature measurement technology
Additional flexibility from customized interstage and backing port position selection 4 years between services with full end-user field serviceability
CMSD enabled low vibration levels Intelligent pumps with included micro-USB port and Edwards nST software allowing pump monitoring, control and configuration
Full suite of tailored accessories
Applications
Chamber evacuation, coating systems, turbomolecular pump systems
Beam Lines, accelerators, mobile pump carts, turbomolecular pump backing, laser evacuation, medical systems GCMS, LCMS, ICPMS, MALDI, inorganic MS, RGA, surface science, leak detectors TEM, SEM, EPMA, SPM sample prep benches
